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Proceedings Paper

SPM metrological assurance using a heterodyne interferometer
Author(s): T. V. Kazieva; A. P. Kuznetsov; K. L. Gubskiy; V. N. Reshetov; M. V. Ponarina; A. S. Antonov; A. S. Useinov
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Paper Abstract

Three-coordinate laser interferometer was designed to enable metrological measurements using conventional scanning probe microscopes. This article presents the results of the errors sources investigation in three-coordinate laser interferometer, describes the features of the optical scheme and data processing system that ensure sub-nanometer accuracy of the measurements.

Paper Details

Date Published: 21 October 2015
PDF: 8 pages
Proc. SPIE 9636, Scanning Microscopies 2015, 96360R (21 October 2015); doi: 10.1117/12.2199874
Show Author Affiliations
T. V. Kazieva, National Research Nuclear Univ. MEPhI (Russian Federation)
A. P. Kuznetsov, National Research Nuclear Univ. MEPhI (Russian Federation)
K. L. Gubskiy, LaserEye LLC (Russian Federation)
V. N. Reshetov, National Research Nuclear Univ. MEPhI (Russian Federation)
Technological Institute of Superhard and Novel Carbon Materials (Russian Federation)
M. V. Ponarina, National Research Nuclear Univ. MEPhI (Russian Federation)
A. S. Antonov, LaserEye LLC (Russian Federation)
A. S. Useinov, Technological Institute of Superhard and Novel Carbon Materials (Russian Federation)


Published in SPIE Proceedings Vol. 9636:
Scanning Microscopies 2015
Michael T. Postek; Dale E. Newbury; S. Frank Platek; Tim K. Maugel, Editor(s)

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