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Proceedings Paper

Tomographic observation of integrated circuit based on x-ray microscopy
Author(s): Xiaoqi Xi; Lei Li; Bin Yan; Lin Deng; Yu Han; Kai Zhang
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Paper Abstract

Three-dimensional observation for the integrated circuit is of potential interest to an improved understanding of the formation of embedded voids in the copper interconnects, which has become major reliability concern in achieving highperformance microprocessors. Nano-scale line width requires the imaging technique with a high spatial resolution as well as penetration through several microns of silicon to maintain the sample integrity. The resolution of Optical microscopy is not enough and the electron microscopy requires invasive sample cross-sectioning, not permitting the in situ identification. The utilization of non-destructive imaging using 3D x-ray microscopy offers the needed resolution and penetration ability without significant damage. In this paper, the ability to image tomographically voids in copper interconnects and the seven metallization layers are demonstrated with bright contrast and a sub-50nm resolution on 8keV BSRF X-ray microscope. The sample is specifically prepared for this initial experiment, with a diameter of ~10.3μm and a thickness of 15.7μm. In the future experiment we are attempting to image the sample in its original state with only the backside silicon substrate removed, realizing the more non-destructive observation.

Paper Details

Date Published: 15 October 2015
PDF: 4 pages
Proc. SPIE 9672, AOPC 2015: Advanced Display Technology; and Micro/Nano Optical Imaging Technologies and Applications, 96720R (15 October 2015); doi: 10.1117/12.2199840
Show Author Affiliations
Xiaoqi Xi, National Digital Switching System Engineering & Technology Research Ctr. (China)
Lei Li, National Digital Switching System Engineering & Technology Research Ctr. (China)
Bin Yan, National Digital Switching System Engineering & Technology Research Ctr. (China)
Lin Deng, National Digital Switching System Engineering & Technology Research Ctr. (China)
Yu Han, National Digital Switching System Engineering & Technology Research Ctr. (China)
Kai Zhang, Institute of High Energy Physics (China)


Published in SPIE Proceedings Vol. 9672:
AOPC 2015: Advanced Display Technology; and Micro/Nano Optical Imaging Technologies and Applications
Byoungho Lee; Yikai Su; Min Gu; Xiaocong Yuan; Daniel Jaque, Editor(s)

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