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Proceedings Paper

Design, assembly and calibration of white-light microscopy interferometer
Author(s): Shuai Wang; Zhishan Gao; Minjue Li; Jingfei Ye; Jinlong Cheng; Zhongming Yang; Qun Yuan
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Paper Abstract

A white-light microscopy interferometer was developed for measurement of the 3D profile and roughness.10X, 20X and 50X Mirau interference microscope objectives with the numerical aperture of 0.3, 0.4 and 0.55 were designed, manufactured and then provided as the accessories. Thickness deviation between beam splitter plate and reference mirror plate as well as the numerical aperture will both affect the contrast of interference fringe, according to optical modeling and image evaluation. The former would generate dispersion and then decrease the fringe contrast, while the latter would not produce dispersion separately but impact the amount of dispersion when thickness deviation exists, and their influence on fringe contrast was based on the expression of white-light interference intensity. Simulations for interference fringes from Mirau interference microscope objectives with different NA and thickness deviation were implemented, demonstrated that the fringe contrast will be falling with NA and thickness deviation increasing. A standard step with the nominal step value of 110 nm was used to calibrate the white-light microscopy interferometer, showing that less than1nm deviation can be reached.

Paper Details

Date Published: 8 October 2015
PDF: 6 pages
Proc. SPIE 9677, AOPC 2015: Optical Test, Measurement, and Equipment, 96771Q (8 October 2015); doi: 10.1117/12.2199819
Show Author Affiliations
Shuai Wang, Nanjing Univ. of Science and Technology (China)
Zhishan Gao, Nanjing Univ. of Science and Technology (China)
Minjue Li, Nanjing Univ. of Science and Technology (China)
Jingfei Ye, Nanjing Univ. of Science and Technology (China)
Jinlong Cheng, Nanjing Univ. of Science and Technology (China)
Zhongming Yang, Nanjing Univ. of Science and Technology (China)
Qun Yuan, Nanjing Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 9677:
AOPC 2015: Optical Test, Measurement, and Equipment
Sen Han; Jonathan D. Ellis; Junpeng Guo; Yongcai Guo, Editor(s)

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