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Proceedings Paper

Fabrication of the blazed convex grating by holographic ion beam etching
Author(s): Quan Liu; Yu Cheng; Fei Gao; Yang Zhou; Jianhong Wu
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Paper Abstract

The blazed convex grating is one of the key elements in Offner imaging spectrometers. In this paper the diffraction characteristics of the blazed convex grating is investigated by using rigorous coupled-wave analysis. The results indicate that within the wavelength from 1 μm to 2.5 μm, the first-order diffraction efficiency can be over 40% through controlling the blazed angle of blazed grating. Furthermore, when the blazed angle is 3.9 degree, the first-order diffraction efficiency is still over 40% with the vertex angles between 120 degree and 150 degree. The blazed convex grating with the spatial frequency of 73 L/mm in the center will be fabricated by holographic lithography-ion beam etching.

Paper Details

Date Published: 15 October 2015
PDF: 6 pages
Proc. SPIE 9672, AOPC 2015: Advanced Display Technology; and Micro/Nano Optical Imaging Technologies and Applications, 96720Q (15 October 2015); doi: 10.1117/12.2199817
Show Author Affiliations
Quan Liu, Soochow Univ. (China)
Yu Cheng, Soochow Univ. (China)
Fei Gao, Soochow Univ. (China)
Yang Zhou, Soochow Univ. (China)
Jianhong Wu, Soochow Univ. (China)


Published in SPIE Proceedings Vol. 9672:
AOPC 2015: Advanced Display Technology; and Micro/Nano Optical Imaging Technologies and Applications
Byoungho Lee; Yikai Su; Min Gu; Xiaocong Yuan; Daniel Jaque, Editor(s)

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