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Proceedings Paper

Nano-structured silicon surfaces with broadband and wide-angle antireflective properties for solar cells
Author(s): Zi-zheng Li; Jin-song Gao; Hai-gui Yang
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Paper Abstract

Silicon with various structural morphologies is widely used for solar cells and other optoelectronic devices. We present a new chemical etching process for nanoscale texturing of Si surfaces, which results in an almost complete suppression of the reflectivity in a broad spectral range, leading to black Si surfaces. The chemical etching process affects only the topmost 200-300 nm of the Si material. And it isn't dependent on the Si surface orientation and doping. Besides, the antireflective performance of reacted Si surface will highly improve with silver catalyst effect. Hence, it can be applied to various structural forms of bulk silicon as well as to thin Si films. The optical properties of various black Si samples are presented and discussed in correlation with the surface morphology, which are measured by atomic force microscope.

Paper Details

Date Published: 15 October 2015
PDF: 6 pages
Proc. SPIE 9673, AOPC 2015: Micro/Nano Optical Manufacturing Technologies; and Laser Processing and Rapid Prototyping Techniques, 96730S (15 October 2015); doi: 10.1117/12.2199813
Show Author Affiliations
Zi-zheng Li, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Univ. of Chinese Academy of Sciences (China)
Jin-song Gao, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Hai-gui Yang, Changchun Institute of Optics, Fine Mechanics and Physics (China)


Published in SPIE Proceedings Vol. 9673:
AOPC 2015: Micro/Nano Optical Manufacturing Technologies; and Laser Processing and Rapid Prototyping Techniques
Lin Li; Minghui Hong; Lan Jiang, Editor(s)

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