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Proceedings Paper

White light phase-stepping interferometry based on insensitive algorithm to periodic systematic error
Author(s): Ningfang Song; Jiao Li; Huipeng Li; Xinkai Luo
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Paper Abstract

Periodic systematic error caused by erroneous reference phase adjustments and instabilities of interferometer has a great influence on precision of measurement micro-profile using white light phase-stepping interferometry. This paper presents a five-frame algorithm that is insensitive to periodic systematic error. This algorithm attempts to eliminate the periodic systematic error when calculating the phase. Both theoretical and experimental results show that the proposed algorithm has good immunity to periodic systematic error and is able to accurately recover the 3D profile of a sample.

Paper Details

Date Published: 8 October 2015
PDF: 6 pages
Proc. SPIE 9677, AOPC 2015: Optical Test, Measurement, and Equipment, 967717 (8 October 2015); doi: 10.1117/12.2199617
Show Author Affiliations
Ningfang Song, Beihang Univ. (China)
Jiao Li, Beihang Univ. (China)
Huipeng Li, Beihang Univ. (China)
Xinkai Luo, Beihang Univ. (China)

Published in SPIE Proceedings Vol. 9677:
AOPC 2015: Optical Test, Measurement, and Equipment
Sen Han; Jonathan D. Ellis; Junpeng Guo; Yongcai Guo, Editor(s)

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