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Proceedings Paper

Integrated Bragg grating filter in ultra-thin silicon-on-insulator strip waveguides
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Paper Abstract

We demonstrate an integrated Bragg grating filter using 60-nm-thick silicon-on-insulator strip waveguides. The ultrathin waveguides exhibit a propagation loss of 0.61 dB/cm. Upon thinning-down, the waveguide effective refractive index is reduced, making the fabrication of Bragg grating filter possible using the standard 248-nm deep ultra-violet (DUV) photolithography process. The Bragg grating filter exhibits a stopband width of 1 nm and an extinction ratio of 31 dB.

Paper Details

Date Published: 15 October 2015
PDF: 4 pages
Proc. SPIE 9673, AOPC 2015: Micro/Nano Optical Manufacturing Technologies; and Laser Processing and Rapid Prototyping Techniques, 96730J (15 October 2015); doi: 10.1117/12.2199171
Show Author Affiliations
Zhi Zou, Shanghai Jiao Tong Univ. (China)
Linjie Zhou, Shanghai Jiao Tong Univ. (China)
Jianping Chen, Shanghai Jiao Tong Univ. (China)


Published in SPIE Proceedings Vol. 9673:
AOPC 2015: Micro/Nano Optical Manufacturing Technologies; and Laser Processing and Rapid Prototyping Techniques
Lin Li; Minghui Hong; Lan Jiang, Editor(s)

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