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Proceedings Paper

Method for the measurement of surface-relief grating’s profile using initial phase of diffraction wave
Author(s): Fanrong Feng; Jianhong Wu; Fei Gao
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Paper Abstract

The analysis of initial phase of diffraction wave of grating mask is based on rigorous coupled-wave analysis method. In this paper, the general diffraction analysis numerical code based on the rigorous coupled-wave analysis (RCWA) is written by MATLAB software to calculate the 0th refraction wave of grating mask. Since large measurement errors will occur while measuring the grove shape by AFM, the method of measuring the initial phase of diffraction wave was proposed and the feasibility of this method has also been verified.

Paper Details

Date Published: 6 November 2015
PDF: 7 pages
Proc. SPIE 9667, International Workshop on Thin Films for Electronics, Electro-Optics, Energy, and Sensors, 96670B (6 November 2015); doi: 10.1117/12.2197989
Show Author Affiliations
Fanrong Feng, Soochow Univ. (China)
Jianhong Wu, Soochow Univ. (China)
Fei Gao, Soochow Univ. (China)


Published in SPIE Proceedings Vol. 9667:
International Workshop on Thin Films for Electronics, Electro-Optics, Energy, and Sensors
Guru Subramanyam, Editor(s)

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