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Proceedings Paper • Open Access

Front Matter: Volume 9526
Author(s): Proceedings of SPIE

Paper Abstract

This PDF file contains the front matter associated with SPIE Proceedings Volume 9526, including the Title Page, Copyright information, Table of Contents, Invited Panel Discussion, and Conference Committee listing.

Paper Details

Date Published: 21 June 2015
PDF: 10 pages
Proc. SPIE 9526, Modeling Aspects in Optical Metrology V, 952601 (21 June 2015); doi: 10.1117/12.2197968
Show Author Affiliations
Proceedings of SPIE, SPIE (United States)


Published in SPIE Proceedings Vol. 9526:
Modeling Aspects in Optical Metrology V
Bernd Bodermann; Karsten Frenner; Richard M. Silver, Editor(s)

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