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Proceedings Paper

Effect of oxygen partial pressure and anneal temperature on BaTiO3 thin film crystal structure
Author(s): Jing Zhang; De-gui Sun; Xiuhua Fu; Dong-mei Liu; Yong-gang Pan; Fei Yang
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Paper Abstract

BaTiO3 film is deposited on single crystal MgO substrate with pulsed laser deposition, and its crystal structure and surface roughness are characterized by X-ray diffraction instrument and atomic force microscope. BaTiO3 film crystal quality is analyzed under three different oxygen partial pressure and three different annealing temperatures. The result shows that when the oxygen partial pressure is 15Pa, crystal surface (001) and (002) diffraction peak of BaTiO3 thin films have higher intensity. It indicated that the film has a good c-axis orientation. When the annealing temperature is 800°C, the intensity of diffraction peak is the maximum, and peak shape is sharper. BaTiO3 crystal film is obtained with highly preferred orientation, and film density is improved. Thus the film has less surface roughness and good crystalline state.

Paper Details

Date Published: 22 August 2015
PDF: 6 pages
Proc. SPIE 9656, International Symposium on Photonics and Optoelectronics 2015, 96560U (22 August 2015); doi: 10.1117/12.2197568
Show Author Affiliations
Jing Zhang, Changchun Univ. of Science and Technology (China)
De-gui Sun, Changchun Univ. of Science and Technology (China)
Xiuhua Fu, Changchun Univ. of Science and Technology (China)
Dong-mei Liu, Changchun Univ. of Science and Technology (China)
Yong-gang Pan, Changchun Univ. of Science and Technology (China)
Fei Yang, Changchun Institute of Optics, Fine Mechanics and Physics (China)


Published in SPIE Proceedings Vol. 9656:
International Symposium on Photonics and Optoelectronics 2015
Zhiping Zhou, Editor(s)

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