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Proceedings Paper

Industrial characterization of nano-scale roughness on polished surfaces
Author(s): Nikolaj A. Feidenhans'l; Poul-Erik Hansen; Lukáš Pilný; Morten H. Madsen; Giuliano Bissacco; Jan C. Petersen; Rafael Taboryski
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Paper Abstract

We report a correlation between the scattering value “Aq” and the ISO standardized roughness parameter Rq. The Aq value is a measure for surface smoothness, and can easily be determined from an optical scattering measurement. The correlation equation extrapolates the Aq value from a narrow measurement range of ±16° from specular to a broader range of ±80°, corresponding to spatial surface wavelengths of 0.8 μm to 25 μm, and converts the Aq value to the Rq value for the surface.

Furthermore, we present an investigation of the changes in scattering intensities, when a surface is covered with a thin liquid film. It is shown that the changes in the angular scattering intensities can be compensated for the liquid film, using empirically determined relations. This allows a restoration of the “true” scattering intensities which would be measured from a corresponding clean surface. The compensated scattering intensities provide Aq values within 5.7 % ± 6.1 % compared to the measurements on clean surfaces.

Paper Details

Date Published: 11 October 2015
PDF: 8 pages
Proc. SPIE 9633, Optifab 2015, 96330B (11 October 2015); doi: 10.1117/12.2197242
Show Author Affiliations
Nikolaj A. Feidenhans'l, Danish Fundamental Metrology Ltd. (Denmark)
Technical Univ. of Denmark (Denmark)
Poul-Erik Hansen, Danish Fundamental Metrology Ltd. (Denmark)
Lukáš Pilný, Technical Univ. of Denmark (Denmark)
Morten H. Madsen, Danish Fundamental Metrology Ltd. (Denmark)
Giuliano Bissacco, Technical Univ. of Denmark (Denmark)
Jan C. Petersen, Danish Fundamental Metrology Ltd. (Denmark)
Rafael Taboryski, Technical Univ. of Denmark (Denmark)


Published in SPIE Proceedings Vol. 9633:
Optifab 2015
Julie L. Bentley; Sebastian Stoebenau, Editor(s)

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