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Proceedings Paper

SLM based semiconductor maskwriter
Author(s): Steffen Diez; Achim Jehle
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Paper Abstract

The high-end semiconductor mask fabrication is dominated by e-beam technology. But still more than 50% of all semiconductor masks are produced by laser writers. The current laser writers are based on the same technology that was used 25 years ago. They are reliable and fast but not very economical. Heidelberg Instruments has developed a new economical and fast laser writer based on the latest technologies.

Paper Details

Date Published: 4 September 2015
PDF: 7 pages
Proc. SPIE 9661, 31st European Mask and Lithography Conference, 966104 (4 September 2015); doi: 10.1117/12.2197024
Show Author Affiliations
Steffen Diez, Heidelberg Instruments Mikrotechnik GmbH (Germany)
Achim Jehle, Heidelberg Instruments Mikrotechnik GmbH (Germany)


Published in SPIE Proceedings Vol. 9661:
31st European Mask and Lithography Conference
Uwe F.W. Behringer; Jo Finders, Editor(s)

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