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Proceedings Paper

Precision machining of optical surfaces with subaperture correction technologies MRF and IBF
Author(s): Olaf Schmelzer; Roman Feldkamp
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Paper Abstract

Precision optical elements are used in a wide range of technical instrumentations. Many optical systems e.g. semiconductor inspection modules, laser heads for laser material processing or high end movie cameras, contain precision optics even aspherical or freeform surfaces. Critical parameters for such systems are wavefront error, image field curvature or scattered light. Following these demands the lens parameters are also critical concerning power and RMSi of the surface form error and micro roughness. How can we reach these requirements? The emphasis of this discussion is set on the application of subaperture correction technologies in the fabrication of high-end aspheres and free-forms. The presentation focuses on the technology chain necessary for the production of high-precision aspherical optical components and the characterization of the applied subaperture finishing tools MRF (magneto-rheological finishing) and IBF (ion beam figuring). These technologies open up the possibility of improving the performance of optical systems.

Paper Details

Date Published: 11 October 2015
PDF: 9 pages
Proc. SPIE 9633, Optifab 2015, 96330E (11 October 2015); doi: 10.1117/12.2196871
Show Author Affiliations
Olaf Schmelzer, JENOPTIK Optical Systems GmbH (Germany)
Roman Feldkamp, JENOPTIK Optical Systems GmbH (Germany)

Published in SPIE Proceedings Vol. 9633:
Optifab 2015
Julie L. Bentley; Sebastian Stoebenau, Editor(s)

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