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Proceedings Paper

Local printability enhancement technique for hotspot fixer for sub-14nm nodes
Author(s): SukYoon Chung; Hyejin Shin; Se-Jin Park; No-Young No-Young; Sergey Kobelkov; Kyohei Sakajiri; Alex Hong; Sukjoo Lee; Alexander Tritchkov; Byung-Il Choi; Soung-Su Woo
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Paper Details

Date Published:
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Proc. SPIE 9635, Photomask Technology 2015, ; doi: 10.1117/12.2196787
Show Author Affiliations
SukYoon Chung, SAMSUNG Electronics Co., Ltd. (Korea, Republic of)
Hyejin Shin, SAMSUNG Electronics Co., Ltd. (Korea, Republic of)
Se-Jin Park, SAMSUNG Electronics Co., Ltd. (Korea, Republic of)
No-Young No-Young, SAMSUNG Electronics Co., Ltd. (Korea, Republic of)
Sergey Kobelkov, Mentor Graphics Corp. (Russian Federation)
Kyohei Sakajiri, Mentor Graphics Corp. (United States)
Alex Hong, Mentor Korea Co., Ltd. (Korea, Republic of)
Sukjoo Lee, SAMSUNG Electronics Co., Ltd. (Korea, Republic of)
Alexander Tritchkov, Mentor Graphics Corp. (United States)
Byung-Il Choi, SAMSUNG Electronics Co., Ltd. (Korea, Republic of)
Soung-Su Woo, Mentor Graphics Corp. (United States)


Published in SPIE Proceedings Vol. 9635:
Photomask Technology 2015
Naoya Hayashi, Editor(s)

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