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Proceedings Paper

Comparative STEREO-LID (Spatio-TEmporally REsolved Optical Laser-Induced Damage) studies of critical defect distributions in IBS, ALD, and electron-beam coated dielectric films
Author(s): Yejia Xu; Amir Khabbazi; Travis Day; Andrew Brown; Luke A. Emmert; Joseph J. Talghader; Ella Field; Damon Kletecka; John Bellum; Dinesh Patel; Carmen S. Menoni; Wolfgang Rudolph
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Paper Abstract

The laser damage behavior of high quality coatings under nanosecond pulse illumination is controlled by statistically distributed defects, whose physical nature and defect mechanisms are still largely unknown. Defect densities are often retrieved by modeling the fluence dependence of the damage probability measured by traditional damage test (TDT) methods, based on ‘damage’ or ‘no damage’ observations. STEREO-LID (Spatio-TEmporally REsolved Optical LaserInduced Damage) allows the determination of the damage fluence (and intensity) in a single test by identifying the initiation of damage both temporally and spatially. The advantages of this test method over the TDT are discussed. In particular, its ability to retrieve detailed defect distribution functions is demonstrated by comparison of results from HfO2 films prepared by ion-assisted electron beam evaporation, ion-beam sputtering, and atomic layer deposition.

Paper Details

Date Published: 23 November 2015
PDF: 9 pages
Proc. SPIE 9632, Laser-Induced Damage in Optical Materials: 2015, 963215 (23 November 2015); doi: 10.1117/12.2196548
Show Author Affiliations
Yejia Xu, The Univ. of New Mexico (United States)
Amir Khabbazi, The Univ. of New Mexico (United States)
Travis Day, Colorado State Univ. (United States)
Andrew Brown, Univ. of Minnesota, Twin Cities (United States)
Luke A. Emmert, The Univ. of New Mexico (United States)
Joseph J. Talghader, Univ. of Minnesota, Twin Cities (United States)
Ella Field, Sandia National Labs. (United States)
Damon Kletecka, Sandia National Labs. (United States)
John Bellum, Sandia National Labs. (United States)
Dinesh Patel, Colorado State Univ. (United States)
Carmen S. Menoni, Colorado State Univ. (United States)
Wolfgang Rudolph, The Univ. of New Mexico (United States)

Published in SPIE Proceedings Vol. 9632:
Laser-Induced Damage in Optical Materials: 2015
Gregory J. Exarhos; Vitaly E. Gruzdev; Joseph A. Menapace; Detlev Ristau; MJ Soileau, Editor(s)

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