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Proceedings Paper

Calibration of the lateral spring constant of atomic force microscope cantilevers
Author(s): Yunpeng Song; Sen Wu; Linyan Xu; Xing Fu
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Paper Abstract

Atomic force microscope (AFM) is very useful in nano-scale force measurement. Lateral force is typically used in nanoscratch and surface friction measurement based on AFM. As one of the most important parameters to obtain lateral force, the lateral spring constant of AFM cantilever probe is of great significance and needs to be quantitative calibrated. Lateral torsion and lateral force of the cantilever are two parameters need to be measured in lateral spring constant calibration. In this article, we develop a calibration system and introduce a calibration method using an AFM head and an electromagnetic balance. An aluminium column with a known angel on top is placed on the weighing pan of the balance. The cantilever is precisely positioned in the AFM head, then approaches and bends on the aluminium column. During this procedure, the bending force and the lateral torsion of the cantilever are synchronously measured by the balance and an optical lever system, respectively. Then the lateral spring constant is calculated with a formula. By using this method, three kinds of rectangular cantilever are calibrated. The relative standard deviations of the calibration results are smaller than 2%.

Paper Details

Date Published: 15 October 2015
PDF: 7 pages
Proc. SPIE 9673, AOPC 2015: Micro/Nano Optical Manufacturing Technologies; and Laser Processing and Rapid Prototyping Techniques, 96730B (15 October 2015); doi: 10.1117/12.2196523
Show Author Affiliations
Yunpeng Song, Tianjin Univ. (China)
Sen Wu, Tianjin Univ. (China)
Linyan Xu, Tianjin Univ. (China)
Xing Fu, Tianjin Univ. (China)

Published in SPIE Proceedings Vol. 9673:
AOPC 2015: Micro/Nano Optical Manufacturing Technologies; and Laser Processing and Rapid Prototyping Techniques
Lin Li; Minghui Hong; Lan Jiang, Editor(s)

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