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Proceedings Paper

Beam conditioning multilayer optics for laboratory x-ray sources
Author(s): Yuriy Platonov; Boris Verman; Licai Jiang; Bonglea Kim
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Paper Abstract

Practically, all modern x-ray diffractometers, SAXS, TXRF systems and many other laboratory X-ray instruments are equipped with multilayer X-ray optics. It is due to a much higher flux these instruments have comparing with those having no optics or having a grazing incidence optics without multilayer coatings. There are variety of the multilayer optics designs – from one bounce collimating parabolic mirror to four corners double bounce focusing mirrors. Design of multilayer optics depends on application, X-ray source parameters, requirements on divergence, focal spot, available room for the optics, manufacturing capability and cost. Key characteristics of the optics, requirements on multilayers d-spacing accuracy, optics slope errors, and substrates surface roughness are discussed in the paper. Different optics designs are considered including recently developed optics for a laboratory topography system and a Hybrid optics combining multilayer and crystal optics for XRR and XRD.

Paper Details

Date Published: 26 August 2015
PDF: 10 pages
Proc. SPIE 9590, Advances in Laboratory-based X-Ray Sources, Optics, and Applications IV, 95900B (26 August 2015); doi: 10.1117/12.2196352
Show Author Affiliations
Yuriy Platonov, Rigaku Innovative Technologies, Inc. (United States)
Boris Verman, Rigaku Innovative Technologies, Inc. (United States)
Licai Jiang, Rigaku Innovative Technologies, Inc. (United States)
Bonglea Kim, Rigaku Innovative Technologies, Inc. (United States)


Published in SPIE Proceedings Vol. 9590:
Advances in Laboratory-based X-Ray Sources, Optics, and Applications IV
Ali M. Khounsary; Carolyn A. MacDonald, Editor(s)

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