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Proceedings Paper

On the prospects of three-dimensional thin film thickness gradients using a dynamic aperture
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Proc. SPIE 9633, Optifab 2015, ; doi: 10.1117/12.2196023
Show Author Affiliations
Raymond Conley, Argonne National Lab. (United States)
David L. Windt, Reflective X-Ray Optics LLC (United States)


Published in SPIE Proceedings Vol. 9633:
Optifab 2015
Julie L. Bentley; Sebastian Stoebenau, Editor(s)

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