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Proceedings Paper

Ptychographic phase retrieval method for characterizing ultra-precise ellipsoidal mirrors
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Paper Abstract

Focusing and imaging optics can be characterized by evaluating the wavefront error of the focused beam. We have bean developing a ptychographic phase retrieval method using a visible laser to measure the wavefront error. In this study, the measurement accuracy of the method is increased by improving both the phase retrieval algorithm and the experimental setup. The system is applied to the characterization of an ellipsoidal mirror used for the focusing of soft X-rays. The posture of the mirror can be measured with a resolution of 1.4 μrad. The wavefront error originating from the surface profile error can be detected with an accuracy of 0.01λ (root mean square).

Paper Details

Date Published: 12 October 2015
PDF: 5 pages
Proc. SPIE 9633, Optifab 2015, 96332C (12 October 2015); doi: 10.1117/12.2195864
Show Author Affiliations
Yoko Takeo, The Univ. of Tokyo (Japan)
Takahiro Saito, The Univ. of Tokyo (Japan)
Hidekazu Mimura, The Univ. of Tokyo (Japan)


Published in SPIE Proceedings Vol. 9633:
Optifab 2015
Julie L. Bentley; Sebastian Stoebenau, Editor(s)

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