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Proceedings Paper

Model-based phase-shifting interferometer
Author(s): Dong Liu; Lei Zhang; Tu Shi; Yongying Yang; Shiyao Chong; Liang Miao; Wei Huang; Yibing Shen; Jian Bai
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Paper Abstract

A model-based phase-shifting interferometer (MPI) is developed, in which a novel calculation technique is proposed instead of the traditional complicated system structure, to achieve versatile, high precision and quantitative surface tests. In the MPI, the partial null lens (PNL) is employed to implement the non-null test. With some alternative PNLs, similar as the transmission spheres in ZYGO interferometers, the MPI provides a flexible test for general spherical and aspherical surfaces. Based on modern computer modeling technique, a reverse iterative optimizing construction (ROR) method is employed for the retrace error correction of non-null test, as well as figure error reconstruction. A self-compiled ray-tracing program is set up for the accurate system modeling and reverse ray tracing. The surface figure error then can be easily extracted from the wavefront data in forms of Zernike polynomials by the ROR method. Experiments of the spherical and aspherical tests are presented to validate the flexibility and accuracy. The test results are compared with those of Zygo interferometer (null tests), which demonstrates the high accuracy of the MPI. With such accuracy and flexibility, the MPI would possess large potential in modern optical shop testing.

Paper Details

Date Published: 11 October 2015
PDF: 10 pages
Proc. SPIE 9633, Optifab 2015, 96331R (11 October 2015); doi: 10.1117/12.2195845
Show Author Affiliations
Dong Liu, Zhejiang Univ. (China)
Lei Zhang, Zhejiang Univ. (China)
Tu Shi, Zhejiang Univ. (China)
Yongying Yang, Zhejiang Univ. (China)
Shiyao Chong, Zhejiang Univ. (China)
Liang Miao, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Wei Huang, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Yibing Shen, Zhejiang Univ. (China)
Jian Bai, Zhejiang Univ. (China)


Published in SPIE Proceedings Vol. 9633:
Optifab 2015
Julie L. Bentley; Sebastian Stoebenau, Editor(s)

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