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Proceedings Paper

Vacuum ultraviolet optical microscopy
Author(s): James F. Young; H. M. Duiker; I. Ferincz; Tasshi Dennis
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Paper Abstract

Microscopy using vacuum ultraviolet and soft x-ray radiation offers high resolution, high contrast, and chemical sensitivity. Holography and contact printing are unique in their potential to achieve wavelength-limited resolution because they eliminate optical elements and their imperfections. Both methods, however, lack magnification and require high resolution films and methods to recover images. We present our results on source development and film characterization.

Paper Details

Date Published: 15 September 1995
PDF: 7 pages
Proc. SPIE 2524, National Science Foundation (NSF) Forum on Optical Science and Engineering, (15 September 1995); doi: 10.1117/12.219574
Show Author Affiliations
James F. Young, Rice Univ. (United States)
H. M. Duiker, Rice Univ. (United States)
I. Ferincz, Rice Univ. (United States)
Tasshi Dennis, Rice Univ. (United States)


Published in SPIE Proceedings Vol. 2524:
National Science Foundation (NSF) Forum on Optical Science and Engineering
William H. Carter, Editor(s)

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