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Proceedings Paper

Comparison of various colloidal silica slurries and process parameters for fused silica finishing
Author(s): S. Campaignolle; C. Maunier; J. Neauport
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Paper Abstract

We have selected three colloidal silica slurries and compared their ability for fused silica finishing, by varying the load and slurry concentration. We found that the process parameters can affect differently the finishing efficiency, roughness and surface defects density, depending on the slurry considered.

Paper Details

Date Published: 11 October 2015
PDF: 5 pages
Proc. SPIE 9633, Optifab 2015, 963308 (11 October 2015); doi: 10.1117/12.2195724
Show Author Affiliations
S. Campaignolle, Commissariat à l'Énergie Atomique, Ctr. d'études scientiques et techniques d'Aquitaine (France)
C. Maunier, Commissariat à l'Énergie Atomique, Ctr. d'études scientiques et techniques d'Aquitaine (France)
J. Neauport, Commissariat à l'Énergie Atomique, Ctr. d'études scientiques et techniques d'Aquitaine (France)


Published in SPIE Proceedings Vol. 9633:
Optifab 2015
Julie L. Bentley; Sebastian Stoebenau, Editor(s)

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