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Proceedings Paper

Analysis on morphological and structural features of graphene layers by using polarization indirect microscopic imaging system
Author(s): Guoyan Liu; Kun Gao; Guoqiang Ni; Xuefeng Liu
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Paper Abstract

Simple polarization indirect microscopic imaging can visualize graphene layer's dimensions features, however, its limited resolution makes it impossible to analyze the other physical characteristics. Our research uses polarization parameter indirect microscopic imaging system with super-resolution to modulate the variation of far field point spread function with varying polarization status and improve wavefront aberration, sensor error, and polarization angle. This method has much higher sensitivity to graphene overlapping layers, edges, wrinkles and grain boundaries. Finally, this technique for graphene inspection that is capable of reaching super-resolution.

Paper Details

Date Published: 12 August 2015
PDF: 7 pages
Proc. SPIE 9624, 2015 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication, 96240I (12 August 2015); doi: 10.1117/12.2195263
Show Author Affiliations
Guoyan Liu, Beijing Institute of Technology (China)
Kun Gao, Beijing Institute of Technology (China)
Guoqiang Ni, Beijing Institute of Technology (China)
Xuefeng Liu, Nanjing Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 9624:
2015 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication
Zhiping Zhou; Changhe Zhou; Pavel Cheben, Editor(s)

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