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Proceedings Paper

Ultra-sensitive acoustic fiber sensors utilizing nano-membranes
Author(s): Wonuk Jo; M. J. F. Digonnet
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Paper Abstract

A new, highly sensitive, compact fiber acoustic sensor is reported that implements a micro-fabricated silicon membrane with a π/2 phase step combined to a single-mode fiber to form a simple interferometric sensor head. Compared to high-sensitivity membrane-based fiber Fabry-Perot (FP) sensors, it has a similar pressure resolution, it operates over a much broad range of wavelengths (~±150 nm vs. ~±1 nm), and fabrication is simpler. A prototype is reported with an average minimum detectable pressure (MDP) as low as 5.4 μPa/√Hz (1-30 kHz), in agreement with a model. A state-of-the-art FP fiber sensor with an average MDP about twice as low is described for comparison.

Paper Details

Date Published: 28 September 2015
PDF: 4 pages
Proc. SPIE 9634, 24th International Conference on Optical Fibre Sensors, 96341P (28 September 2015); doi: 10.1117/12.2194400
Show Author Affiliations
Wonuk Jo, Stanford Univ. (United States)
M. J. F. Digonnet, Stanford Univ. (United States)


Published in SPIE Proceedings Vol. 9634:
24th International Conference on Optical Fibre Sensors
Hypolito José Kalinowski; José Luís Fabris; Wojtek J. Bock, Editor(s)

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