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Proceedings Paper

Integrated vapor-liquid-solid silicon mass sensors (Presentation Recording)
Author(s): Brian A Bryce; Jason J Gorman; Sergiy Keylyuk; Albert Davydov
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Paper Abstract

We present the results and progress of research to create a multiplex chemical sensor based on Au catalyzed vapor-liquid-solid (VLS) silicon nanowires deployed as resonant mass sensors. Each element of this sensor has a single VLS wire grown in close proximity to a Si photodiode. Together they create a Fabry-Pérot interferometer that allows for the sensitive detection of the beam’s resonant motion. Small changes in mass on the cantilever that occur as a result of chemical absorption on the functionalized Au surface shift the resonant frequency. Our integrated approach will allow large reductions in system complexity for this sensor class.

Paper Details

Date Published: 5 October 2015
PDF: 1 pages
Proc. SPIE 9553, Low-Dimensional Materials and Devices, 955304 (5 October 2015); doi: 10.1117/12.2192083
Show Author Affiliations
Brian A Bryce, NIST (United States)
Jason J Gorman, NIST (United States)
Sergiy Keylyuk, NIST (United States)
Albert Davydov, NIST (United States)


Published in SPIE Proceedings Vol. 9553:
Low-Dimensional Materials and Devices
Nobuhiko P. Kobayashi; A. Alec Talin; M. Saif Islam; Albert V. Davydov, Editor(s)

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