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Proceedings Paper

Simulation of laser radar tooling ball measurements: focus dependence
Author(s): Daniel G. Smith; Anthony Slotwinski; Thomas Hedges
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Paper Abstract

The Nikon Metrology Laser Radar system focuses a beam from a fiber to a target object and receives the light scattered from the target through the same fiber. The system can, among other things, make highly accurate measurements of the position of a tooling ball by locating the angular position of peak signal quality, which is related to the fiber coupling efficiency. This article explores the relationship between fiber coupling efficiency and focus condition.

Paper Details

Date Published: 15 October 2015
PDF: 10 pages
Proc. SPIE 9630, Optical Systems Design 2015: Computational Optics, 96300J (15 October 2015); doi: 10.1117/12.2191766
Show Author Affiliations
Daniel G. Smith, Nikon Research Corp. of America (United States)
Anthony Slotwinski, Nikon Metrology, Inc. (United States)
Thomas Hedges, Nikon Metrology, Inc. (United States)


Published in SPIE Proceedings Vol. 9630:
Optical Systems Design 2015: Computational Optics
Daniel G. Smith; Frank Wyrowski; Andreas Erdmann, Editor(s)

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