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Proceedings Paper

Model-based calibration of an interferometric setup with a diffractive zoom-lens
Author(s): Alexander Bielke; Goran Baer; Christof Pruss; Wolfgang Osten
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Paper Abstract

The fabrication of aspheres and freeform surfaces requires a high-precision shape measurement of these elements. In terms of accuracy, interferometric systems provide the best performance for specular surfaces. To test aspherical lenses, it is necessary to adapt or partially adapt the test wavefront to the surface under test.

Recently, we have proposed an interferometric setup with a diffractive zoom-lens that includes two computer generated holograms for this purpose.1 Their surface phases are a combination of a cubic function for the adaption of aberrations and correction terms necessary to compensate substrate-induced errors. With this system based on Alvarez design a variable defocus and astigmatism controlled by a lateral shift of the second element is achieved.

One of the main challenges is the calibration of the system.

We use a black-box model2 recently introduced for a non-null test interferometer, the so called tilted wave interferometer3 (TWI). With it, the calibration data are calculated by solving an inverse problem. The system is divided in the two parts of illumination and imaging optics. By the solution of an inverse problem, we get a set of data, which describes separately the wavefronts of the illumination and imaging optics. The main difference to the TWI is the flexible diffractive element, which can be used in continuous positions. To combine the calibration data of a couple of positions with the exact placement, we designed alignment structures on the hologram. We will show the general functionality of this calibration and first simulation results.

Paper Details

Date Published: 5 August 2015
PDF: 6 pages
Proc. SPIE 9618, 2015 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments, 961807 (5 August 2015); doi: 10.1117/12.2191579
Show Author Affiliations
Alexander Bielke, Institut für Technische Optik (Germany)
Goran Baer, Institut für Technische Optik (Germany)
Christof Pruss, Institut für Technische Optik (Germany)
Wolfgang Osten, Institut für Technische Optik (Germany)

Published in SPIE Proceedings Vol. 9618:
2015 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments
Yongtian Wang; Xiaodi Tan; Kimio Tatsuno, Editor(s)

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