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Proceedings Paper

High efficiency RF-plasma source with increased energy range
Author(s): D. Arhilger; H. Hagedorn; H. Reus; A. Zöller
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Paper Abstract

A new, highly efficient impedance matching network is introduced , increasing the LION300 RF-source efficiency by approximately 20% and enabling considerably higher SiO2 rates for the production of shift-free and low scattering interference filters. Results of single layer coatings and a UV-IR cut filter are presented.

Paper Details

Date Published: 23 September 2015
PDF: 5 pages
Proc. SPIE 9627, Optical Systems Design 2015: Advances in Optical Thin Films V, 96270O (23 September 2015); doi: 10.1117/12.2191344
Show Author Affiliations
D. Arhilger, Bühler Alzenau GmbH (Germany)
H. Hagedorn, Bühler Alzenau GmbH (Germany)
H. Reus, Bühler Alzenau GmbH (Germany)
A. Zöller, Bühler Alzenau GmbH (Germany)


Published in SPIE Proceedings Vol. 9627:
Optical Systems Design 2015: Advances in Optical Thin Films V
Michel Lequime; H. Angus Macleod; Detlev Ristau, Editor(s)

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