Share Email Print
cover

Proceedings Paper

Preparation and characterization of aluminum oxide/aluminum fluoride mixture coatings for applications in the deep ultraviolet spectral range
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

In the present study the preparation and characterization of Al2O3/AlF3 material mixture coatings is described. The main focus is on the correlation between the optical properties (refractive index, extinction coefficient), elemental composition and mechanical properties, depending on deposition conditions. The thin mixture films prepared with E-Beam gun evaporation with and without plasma ion assistance show a continuous change in the refractive index between the basic materials extrema (n=1.4 - 1.75), depending on the constituents volume filling factors. At the same time, extinction coefficients vary between less than 1x10-4 and 2x10-3. In addition, it can be shown that in dependency of the applied plasma ion assistance, the residual stress inside the mixture layers is tunable. Finally, several multilayer coatings has been prepared and investigated.

Paper Details

Date Published: 23 September 2015
PDF: 11 pages
Proc. SPIE 9627, Optical Systems Design 2015: Advances in Optical Thin Films V, 96271N (23 September 2015); doi: 10.1117/12.2191282
Show Author Affiliations
Christian Franke, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Friedrich-Schiller-Univ. Jena (Germany)
Olaf Stenzel, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Friedrich-Schiller-Univ. Jena (Germany)
Steffen Wilbrandt, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Norbert Kaiser, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Friedrich-Schiller-Univ. Jena (Germany)
Andreas Tünnermann, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Friedrich-Schiller-Univ. Jena (Germany)


Published in SPIE Proceedings Vol. 9627:
Optical Systems Design 2015: Advances in Optical Thin Films V
Michel Lequime; H. Angus Macleod; Detlev Ristau, Editor(s)

© SPIE. Terms of Use
Back to Top