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Proceedings Paper

Advanced optical monitoring system using a new developed low noise wideband spectrometer system
Author(s): Alfons Zöller; Detlef Arhilger; Michael Boos; Harro Hagedorn
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Paper Abstract

A newly developed wideband optical monitoring system is based on a fast triggered spectrometer with a high dynamic array detector with low signal noise. It is useful for fast in-situ transmittance measurements on the rotating substrate holder during the deposition. The spectra can be stored and used for reverse engineering analysis. Layer thickness control with monochromatic monitoring strategies can be applied by using a selected single wavelength from the array detector. The high dynamic detector supports the classical turning point monitoring as well as trigger-point cut-offs with online corrected end points. The basic system design and functionalities are described. The results of multilayer systems demonstrate the performance of the new developed monitoring system.

Paper Details

Date Published: 23 September 2015
PDF: 5 pages
Proc. SPIE 9627, Optical Systems Design 2015: Advances in Optical Thin Films V, 962712 (23 September 2015); doi: 10.1117/12.2191269
Show Author Affiliations
Alfons Zöller, Bühler Alzenau GmbH (Germany)
Detlef Arhilger, Bühler Alzenau GmbH (Germany)
Michael Boos, Bühler Alzenau GmbH (Germany)
Harro Hagedorn, Bühler Alzenau GmbH (Germany)

Published in SPIE Proceedings Vol. 9627:
Optical Systems Design 2015: Advances in Optical Thin Films V
Michel Lequime; H. Angus Macleod; Detlev Ristau, Editor(s)

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