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Proceedings Paper

Analysis of the pinhole array illumination source for high precision wavefront error metrology
Author(s): Zengxiong Lu; Yuejing Qi; Qingbin Meng; Jiani Su; Guangyi Liu
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Paper Abstract

Rapid inspection of a projection optics incorporated to 193 nm excimer-exposure system is important for 90 nm node and beyond IC manufacturing. To overcome the problems of the collimator lens presented in high NA high accuracy wavefront error metrology with Shack-Hartmann wavefront sensor, a pinhole array is used as the illumination source, which produces an array of high NA and high accuracy spherical waves, and form a high brightness source. In this paper, the diffraction of the pinhole array is calculated by using finite-difference time domain method and the theory of partial coherence. The distribution of the pinhole array considered here includes square, hexagonal and random distribution. The results shown that, pinhole diameter and separation in pinhole array have significant influence on the intensity contrast of the diffracted light, and the light intensity diffracted by the random pinhole array is smoother than that diffracted by the square or hexagonal distribution pinhole array, and is preferential in high precision wavefront error metrology.

Paper Details

Date Published: 7 August 2015
PDF: 8 pages
Proc. SPIE 9623, 2015 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 962302 (7 August 2015); doi: 10.1117/12.2191100
Show Author Affiliations
Zengxiong Lu, Academy of Opto-Electronics (China)
Beijing Excimer Laser Technology and Engineering Ctr. (China)
Yuejing Qi, Academy of Opto-Electronics (China)
Beijing Excimer Laser Technology and Engineering Ctr. (China)
Qingbin Meng, Academy of Opto-Electronics (China)
Beijing Excimer Laser Technology and Engineering Ctr. (China)
Univ. of Chinese Academy of Sciences (China)
Jiani Su, Academy of Opto-Electronics (China)
Beijing Excimer Laser Technology and Engineering Ctr. (China)
Guangyi Liu, Academy of Opto-Electronics (China)
Beijing Excimer Laser Technology and Engineering Ctr. (China)


Published in SPIE Proceedings Vol. 9623:
2015 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems
Jigui Zhu; Hwa-Yaw Tam; Kexin Xu; Hai Xiao; Sen Han, Editor(s)

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