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Proceedings Paper

Electron-excited energy dispersive x-ray spectrometry in the variable pressure scanning electron microscope (EDS/VPSEM): it's not microanalysis anymore!
Author(s): Dale E. Newbury; Nicholas W. M. Ritchie
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Paper Abstract

X-ray spectra suffer significantly degraded spatial resolution when measured in the variable-pressure scanning electron microscope (VPSEM, chamber pressure 1 Pa to 2500 Pa) as compared to highvacuum SEM (operating pressure < 10 mPa). Depending on the gas path length, electrons that are scattered hundreds of micrometers outside the focused beam can contribute 90% or more of the measured spectrum. Monte Carlo electron trajectory simulation, available in NIST DTSA-II, models the gas scattering and simulates mixed composition targets, e.g., particle on substrate. The impact of gas scattering at the major (C > 0.1 mass fraction), minor (0.01 ≤ C ≤ 0.1), and trace (C < 0.01) constituent levels can be estimated. NIST DTSA-II for Java-platforms is available free at:

Paper Details

Date Published: 21 October 2015
PDF: 13 pages
Proc. SPIE 9636, Scanning Microscopies 2015, 96360T (21 October 2015); doi: 10.1117/12.2191088
Show Author Affiliations
Dale E. Newbury, National Institute of Standards and Technology (United States)
Nicholas W. M. Ritchie, National Institute of Standards and Technology (United States)

Published in SPIE Proceedings Vol. 9636:
Scanning Microscopies 2015
Michael T. Postek; Dale E. Newbury; S. Frank Platek; Tim K. Maugel, Editor(s)

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