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Proceedings Paper

Properties of transparent organic-inorganic composite coatings prepared by ion beam sputtering of PTFE and Al2O3
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Paper Abstract

Composite organic-inorganic coatings are realized by ion beam sputtering (IBS) from a zone target consisting of PTFE and Al2O3. The composition of the sputtered coatings is measured by Energy-Dispersive X-ray spectroscopy and the molecular structure is analyzed by Fourier Transform Infrared spectroscopy. The variation of the refractive index and the optical quality in dependence of the carbon-fluorine content for different material compositions is investigated. Furthermore, the intrinsic stress of the coatings is analyzed and a change from compressive to tensile stress in dependence of the composition is observed. The production of ion beam sputtered composite coatings with low refractive index and tensile stress is demonstrated.

Paper Details

Date Published: 23 September 2015
PDF: 9 pages
Proc. SPIE 9627, Optical Systems Design 2015: Advances in Optical Thin Films V, 96270F (23 September 2015); doi: 10.1117/12.2191067
Show Author Affiliations
Melanie Gauch, Laser Zentrum Hannover e.V. (Germany)
Henrik Ehlers, Laser Zentrum Hannover e.V. (Germany)
Detlev Ristau, Laser Zentrum Hannover e.V. (Germany)

Published in SPIE Proceedings Vol. 9627:
Optical Systems Design 2015: Advances in Optical Thin Films V
Michel Lequime; H. Angus Macleod; Detlev Ristau, Editor(s)

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