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Proceedings Paper

A developed method for surface testing based on the scattering interference effect
Author(s): Zhongqi Tan; Yun Huang; Suyong Wu; Xiaobao Zhang; Yibo Zhang
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Paper Abstract

Light scattering is an important and classical method for optical surface testing. Typical scheme of light scattering measurement often uses a single laser beam incidence, and then evaluates the surface quality via detecting and analyzing the scattering signal. In this work, a developed method for optical surface testing is proposed and demonstrated, and whose measuring principle is based on the scattering interference effect. In this approach, a single longitudinal mode laser beam is divided into two beams, when these beams irradiate the optical surface, their respective scattering fields would interfere with each other. If the phase between these incidence lights is scanned periodically, their scattering light interference signal would fluctuate simultaneously. Through analyzing this kind of scattering signal, our method can not only determine the scattering loss of optical surface, but also scale its inhomogeneity performance. A simply set of experimental apparatus is built up and used to demonstrated this method, which uses a single mode laser as the light source. Furthermore, to modulate the phase difference between two incidence beams, a piezoelectric ceramic is used. Some typical cases are then experimented and discussed, the results show that this method can be used to calibrate the quality of optical surface.

Paper Details

Date Published: 24 September 2015
PDF: 6 pages
Proc. SPIE 9628, Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V, 96280Q (24 September 2015); doi: 10.1117/12.2191034
Show Author Affiliations
Zhongqi Tan, National Univ. of Defense Technology (China)
Yun Huang, National Univ. of Defense Technology (China)
Suyong Wu, National Univ. of Defense Technology (China)
Xiaobao Zhang, National Univ. of Defense Technology (China)
Yibo Zhang, National Univ. of Defense Technology (China)


Published in SPIE Proceedings Vol. 9628:
Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V
Angela Duparré; Roland Geyl, Editor(s)

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