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Proceedings Paper

Untethered microscale flight: mechanisms and platforms for future aerial MEMS microrobots
Author(s): Syed A. Hussain; Spencer Ward; Omid Mahdavipour; Ratul Majumdar; Igor Paprotny
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Paper Abstract

This paper describes initial work on untethered microscale flying structures as a platform for new class of aerial MEMS microrobots. We present and analyze both biomimetic structures based partially on wing designs of smallest flying insects on Earth, as well as stress-engineered structures powered by radiometric (thermal) forces. The latter devices, also called MEMS Microfliers are 300 μm × 300 μm × 1.5 μm in size, and are fabricated out of polycrystalline silicon. A convex chassis, formed through a novel in-situ masked post-release stress-engineering process, ensures their static inflight stability. High-speed optical micrography was used to image these MEMS microfliers in mid-flight, analyzing their flight profile.

Paper Details

Date Published: 18 June 2015
PDF: 12 pages
Proc. SPIE 9494, Next-Generation Robotics II; and Machine Intelligence and Bio-inspired Computation: Theory and Applications IX, 94940F (18 June 2015); doi: 10.1117/12.2190851
Show Author Affiliations
Syed A. Hussain, Univ. of Illinois at Chicago (United States)
Spencer Ward, Univ. of Illinois at Chicago (United States)
Omid Mahdavipour, Univ. of Illinois at Chicago (United States)
Ratul Majumdar, Univ. of Illinois at Chicago (United States)
Igor Paprotny, Univ. of Illinois at Chicago (United States)


Published in SPIE Proceedings Vol. 9494:
Next-Generation Robotics II; and Machine Intelligence and Bio-inspired Computation: Theory and Applications IX
Misty Blowers; Dan Popa; Muthu B. J. Wijesundara, Editor(s)

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