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Proceedings Paper

Industrial interferometry systems for multi-axis measurement
Author(s): Jindřich Oulehla; Miroslava Holá; Jan Hrabina; Josef Lazar; Ondřej Číp; Miloslav Vychodil; Petr Sedlár; Milan Provaznik
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Paper Abstract

We report on the results of the common collaborative project of applied research where the Institute of Scfientific Instruments (ISI) of the Academy of Sciences of the Czech Republic and a company Meopta – optika joined their effort in development of high-precision interferometric systems for dimensional metrology and nanometrology. This research exploits previous results in the field of laser standards of optical frequencies and the methodology of interferometric metrology of length together with detection systems of interference signals and their processing at the ISI and the production technology of precise optical components at Meopta – optika. Within this project we developed a compact, solid-state frequency stabilized laser referenced to iodine transitions and technology of iodine cells for laser frequency stabilization. A fundamental setup of the laser interferometer has been arranged and tested. The company Meopta – optika contributes with development of new technology for processing and polishing of high-precision flat-surface optical components.

Paper Details

Date Published: 22 June 2015
PDF: 5 pages
Proc. SPIE 9525, Optical Measurement Systems for Industrial Inspection IX, 95254M (22 June 2015); doi: 10.1117/12.2190747
Show Author Affiliations
Jindřich Oulehla, Institute of Scientific Instruments of the ASCR, v.v.i. (Czech Republic)
Miroslava Holá, Institute of Scientific Instruments of the ASCR, v.v.i. (Czech Republic)
Brno Univ. of Technology (Czech Republic)
Jan Hrabina, Institute of Scientific Instruments of the ASCR, v.v.i. (Czech Republic)
Josef Lazar, Institute of Scientific Instruments of the ASCR, v.v.i. (Czech Republic)
Ondřej Číp, Institute of Scientific Instruments of the ASCR, v.v.i. (Czech Republic)
Miloslav Vychodil, Meopta - optika, s.r.o. (Czech Republic)
Petr Sedlár, Meopta - optika, s.r.o. (Czech Republic)
Milan Provaznik, Meopta - optika, s.r.o. (Czech Republic)


Published in SPIE Proceedings Vol. 9525:
Optical Measurement Systems for Industrial Inspection IX
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves, Editor(s)

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