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Proceedings Paper

Surface assessment and mitigation of DUV optics
Author(s): Jue Wang
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Paper Abstract

CaF2 is one of the foremost optical materials used in ArF excimer laser optics. Surface quality of optically finished CaF2 plays an important role in the component’s lifetime. Several techniques were employed to assess surface quality of optically finished CaF2 in terms of top surface and subsurface damage, resulting in subsurface-damagefree CaF2. UV light and plasma interaction with CaF2 surfaces were investigated. The results were discussed in terms of surface roughness and cleanness associated with surface finishing and optical coatings.

Paper Details

Date Published: 24 September 2015
PDF: 7 pages
Proc. SPIE 9628, Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V, 96280Y (24 September 2015); doi: 10.1117/12.2190684
Show Author Affiliations
Jue Wang, Corning Specialty Materials, Inc. (United States)


Published in SPIE Proceedings Vol. 9628:
Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V
Angela Duparré; Roland Geyl, Editor(s)

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