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Proceedings Paper

Design and fabrication of sub-wavelength metal grating polarizer in visible broadband
Author(s): Yang Zhou; Quan Liu; Jianhong Wu
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Paper Abstract

In this paper, a sub-wavelength metal grating polarizer at visible region is designed by Finite Difference Time Domain (FDTD) method. We have analyzed the effects of the period, the thickness of metal layer and the duty cycle on the performance of the metal grating polarizer. Simulation results show that in order to increase the metal grating transmissivity and extinction ratio and to reduce the angle sensitivity (±30°), the period should be less than 200 nm; Therefore, the structure with 180nm period and an 120nm Al layer is chosen, and the transmission efficiency and extinction ratio is more than 75% and 25dB respectively. Finally, a prototype of the metal grating has been fabricated by holographic-immersion lithography and ion beam etching.

Paper Details

Date Published: 12 August 2015
PDF: 7 pages
Proc. SPIE 9624, 2015 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication, 96240B (12 August 2015); doi: 10.1117/12.2190505
Show Author Affiliations
Yang Zhou, Soochow Univ. (China)
Quan Liu, Soochow Univ. (China)
Jianhong Wu, Soochow Univ. (China)


Published in SPIE Proceedings Vol. 9624:
2015 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication
Zhiping Zhou; Changhe Zhou; Pavel Cheben, Editor(s)

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