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Proceedings Paper

3D interferometric microscope: color visualization of engineered surfaces for industrial applications
Author(s): Joanna Schmit; Matt Novak; Son Bui
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Paper Abstract

3D microscopes based on white light interference (WLI) provide precise measurement for the topography of engineering surfaces. However, the display of an object in its true colors as observed under white illumination is often desired; this traditionally has presented a challenge for WLI-based microscopes. Such 3D color display is appealing to the eye and great for presentations, and also provides fast evaluation of certain characteristics like defects, delamination, or deposition of different materials. Determination of color as observed by interferometric objectives is not straightforward; we will present how color imaging capabilities similar to an ordinary microscope can be obtained in interference microscopes based on WLI and we will give measurement and imaging examples of a few industrial samples.

Paper Details

Date Published: 1 September 2015
PDF: 8 pages
Proc. SPIE 9576, Applied Advanced Optical Metrology Solutions, 957607 (1 September 2015); doi: 10.1117/12.2190352
Show Author Affiliations
Joanna Schmit, Bruker Nano Surfaces, Inc. (United States)
Matt Novak, Bruker Nano Surfaces, Inc. (United States)
Son Bui, Bruker Nano Surfaces, Inc. (United States)

Published in SPIE Proceedings Vol. 9576:
Applied Advanced Optical Metrology Solutions
Erik Novak; James D. Trolinger, Editor(s)

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