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Proceedings Paper

Development of a deflectometer for accurate surface figure metrology
Author(s): Mikhail V. Gubarev; Brian Ramsey; Carolyn Atkins; Andrew Eberhardt
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Paper Abstract

Marshall Space Flight Center is developing a direct fabrication technique in which high resolution x-ray optics are fabricated through surface polishing and figuring of a full-shell substrate. The use of a computer controlled polishing machine leads to quick convergence to high resolution mirrors. The vailability of an in situ surface figure metrology technique would permit even higher convergence rates and reduce the surface profile errors associated with installation and re-alignment of the x-ray mirror shell between the metrology and polishing processes. A surface-figure-metrology instrument based on an optical deflectometer scheme is under development at the Marshall Space Flight Center (MSFC). The current status of the deflectometer instrument development is presented here.

Paper Details

Date Published: 23 September 2015
PDF: 7 pages
Proc. SPIE 9603, Optics for EUV, X-Ray, and Gamma-Ray Astronomy VII, 96031T (23 September 2015); doi: 10.1117/12.2190026
Show Author Affiliations
Mikhail V. Gubarev, NASA Marshall Space Flight Ctr. (United States)
Brian Ramsey, NASA Marshall Space Flight Ctr. (United States)
Carolyn Atkins, The Univ. of Alabama in Huntsville (United States)
Andrew Eberhardt, Univ. of Washington (United States)

Published in SPIE Proceedings Vol. 9603:
Optics for EUV, X-Ray, and Gamma-Ray Astronomy VII
Stephen L. O'Dell; Giovanni Pareschi, Editor(s)

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