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Proceedings Paper • Open Access

Optical super-resolution methodology for 3D full field surface profilometry to reconstruction of micro gratings (Withdrawal Notice)
Author(s): Liang-Chia Chen; Hai Hong Hoang; Shyh-Tsong Lin; Kuang-Chao Fan; Rodion V. Kulikov

Paper Abstract

Publisher’s Note: This paper, originally published on 17 July 2015, was withdrawn per author request, if you have any questions please contact SPIE Digital Library Customer Service for assistance.

Paper Details

Date Published: 17 July 2015
PDF: 1 pages
Proc. SPIE 9524, International Conference on Optical and Photonic Engineering (icOPEN 2015), 952421 (17 July 2015); doi: 10.1117/12.2189618
Show Author Affiliations
Liang-Chia Chen, National Taiwan Univ. (Taiwan)
National Taipei Univ. of Technology (Taiwan)
Hai Hong Hoang, National Taipei Univ. of Technology (Taiwan)
Shyh-Tsong Lin, National Taipei Univ. of Technology (Taiwan)
Kuang-Chao Fan, National Taiwan Univ. (Taiwan)
Rodion V. Kulikov, Technological Design Institute of Scientific Instrument Engineering (Russian Federation)


Published in SPIE Proceedings Vol. 9524:
International Conference on Optical and Photonic Engineering (icOPEN 2015)
Anand K. Asundi; Yu Fu, Editor(s)

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