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Proceedings Paper

Evaluation of resolution performance of high energy x-ray CT
Author(s): Makoto Abe; Hiroyuki Fujimoto; Osamu Sato; Katsutoshi Sato; Toshiyuki Takatsuji
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Paper Abstract

Dimensional X-ray CT has attracted production industry due to its nature [1] enabling not only external dimensional measurement but also internal dimensional measurement which has been difficult for pre-existing dimensional measurement instruments. However, because the reconstruction process of three dimensional volume image may be affected by various kinds of error sources of the hardware and also the software, performance evaluation of dimensional X-ray CT has become one of the major issues [2], especially for X-ray CT system with higher energy such as several MeV. Resolution performance of high energy X-ray CT was evaluated by using a series of phantoms which equip regular line-and-space structures with various pitch sizes down to 100 micrometer. These phantoms were prototyped in the identical pitch sizes with three different materials. These phantoms were practically measured by a high energy X-ray CT. Results and perspective of the resolution performance is presented.

Paper Details

Date Published: 17 July 2015
PDF: 4 pages
Proc. SPIE 9524, International Conference on Optical and Photonic Engineering (icOPEN 2015), 95241M (17 July 2015); doi: 10.1117/12.2189513
Show Author Affiliations
Makoto Abe, National Metrology Institute of Japan (Japan)
Hiroyuki Fujimoto, National Metrology Institute of Japan (Japan)
Osamu Sato, National Metrology Institute of Japan (Japan)
Katsutoshi Sato, Hitachi Corp. (Japan)
Toshiyuki Takatsuji, National Metrology Institute of Japan (Japan)


Published in SPIE Proceedings Vol. 9524:
International Conference on Optical and Photonic Engineering (icOPEN 2015)
Anand K. Asundi; Yu Fu, Editor(s)

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