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Proceedings Paper

A novel absolute measurement for the low-frequency figure correction of aspheric surfaces
Author(s): Wei-Cheng Lin; Shenq-Tsong Chang; Cheng-Fang Ho; Ching-Hsiang Kuo; Chien-Kai Chung; Wei-Yao Hsu; Shih-Feng Tseng; Cheng-Kuo Sung
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Paper Abstract

This study proposes an absolute measurement method with a computer-generated hologram (CGHs) to assist the identification of manufacturing form error, and gravity and mounting resulted distortions for a 300 mm aspherical mirror. This method adopts the frequency of peaks and valleys of each Zernike coefficient grabbed by the measurement with various orientations of the mirror in horizontal optical-axis configuration. In addition, the rotational-symmetric aberration (spherical aberration) is calibrated with random ball test method. According to the measured absolute surface figure, a high accuracy aspherical surface with peak to valley (P-V) value of 1/8 wave @ 632.8 nm was fabricated after surface figure correction with the reconstructed error map.

Paper Details

Date Published: 17 July 2015
PDF: 7 pages
Proc. SPIE 9524, International Conference on Optical and Photonic Engineering (icOPEN 2015), 952417 (17 July 2015); doi: 10.1117/12.2189408
Show Author Affiliations
Wei-Cheng Lin, Instrument Technology Research Ctr. (Taiwan)
National Tsing Hua Univ. (China)
Shenq-Tsong Chang, Instrument Technology Research Ctr. (Taiwan)
Cheng-Fang Ho, Instrument Technology Research Ctr. (Taiwan)
Ching-Hsiang Kuo, Instrument Technology Research Ctr. (Taiwan)
Chien-Kai Chung, Instrument Technology Research Ctr. (Taiwan)
Wei-Yao Hsu, Instrument Technology Research Ctr. (Taiwan)
Shih-Feng Tseng, Instrument Technology Research Ctr. (Taiwan)
Cheng-Kuo Sung, National Tsing Hua Univ. (Taiwan)

Published in SPIE Proceedings Vol. 9524:
International Conference on Optical and Photonic Engineering (icOPEN 2015)
Anand K. Asundi; Yu Fu, Editor(s)

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