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Proceedings Paper

Mechanical design of a precision linear flexural stage for 3D x-ray diffraction microscope at the Advanced Photon Source
Author(s): D. Shu; W. Liu; S. Kearney; J. Anton; J. Z. Tischler
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Paper Abstract

The 3-D X-ray diffraction microscope is a new nondestructive tool for the three-dimensional characterization of mesoscopic materials structure. A flexural-pivot-based precision linear stage has been designed to perform a wire scan as a differential aperture for the 3-D diffraction microscope at the Advanced Photon Source, Argonne National Laboratory. The mechanical design and finite element analyses of the flexural stage, as well as its initial mechanical test results with laser interferometer are described in this paper.

Paper Details

Date Published: 2 September 2015
PDF: 8 pages
Proc. SPIE 9573, Optomechanical Engineering 2015, 95730S (2 September 2015); doi: 10.1117/12.2189311
Show Author Affiliations
D. Shu, Argonne National Lab. (United States)
W. Liu, Argonne National Lab. (United States)
S. Kearney, Argonne National Lab. (United States)
Univ. of Illinois at Chicago (United States)
J. Anton, Argonne National Lab. (United States)
Univ. of Illinois at Chicago (United States)
J. Z. Tischler, Argonne National Lab. (United States)


Published in SPIE Proceedings Vol. 9573:
Optomechanical Engineering 2015
Alson E. Hatheway, Editor(s)

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