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Proceedings Paper

Dielectrophoresis based integration of nanostructures and their sensorial application
Author(s): Christian Leiterer; Gerald Brönstrup; Steffen Berg; Norbert Jahr; Wolfgang Fritzsche
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Paper Abstract

Here we present a technique to integrate bottom-up nanostructures for optoelectronic and chemoresistive sensing using an AC electrical field. The work focuses mainly on two types of nanostructured materials: gold nanoparticle and silicon nanowire. In terms of electrical microintegration of these structures, it is especially important to apply a reliable electrical contact with low contact-resistance, in order to be able to use them as optoelectronic or chemo resistive sensors. To achieve this, a micro integration process was developed to achieve this goal. The contacted nanostructures were characterized electrically to optimize the integration procedure and acquire best possible sensing capabilities. Silicon nanowires were demonstrated to work as wavelength sensitive optical sensors and gold nanoparticle as marker free chemo resistive sensor.

Paper Details

Date Published: 28 August 2015
PDF: 7 pages
Proc. SPIE 9555, Optical Sensing, Imaging, and Photon Counting: Nanostructured Devices and Applications, 95550Q (28 August 2015); doi: 10.1117/12.2189235
Show Author Affiliations
Christian Leiterer, Leibniz-Institut für Photonische Technologien e.V. (Germany)
Macquarie Univ. (Australia)
Gerald Brönstrup, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH (Germany)
Steffen Berg, Leibniz-Institut für Photonische Technologien e.V. (Germany)
Norbert Jahr, Leibniz-Institut für Photonische Technologien e.V. (Germany)
Wolfgang Fritzsche, Leibniz-Institut für Photonische Technologien e.V. (Germany)


Published in SPIE Proceedings Vol. 9555:
Optical Sensing, Imaging, and Photon Counting: Nanostructured Devices and Applications
Manijeh Razeghi; Dorota S. Temple; Gail J. Brown, Editor(s)

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