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Proceedings Paper

Nanofabrication of ultra-low reflectivity black silicon surfaces and devices (Presentation Recording)
Author(s): Victor E. White; Karl Y. Yee; Kunjithapatham Balasubramanian; Pierre M. Echternach; Richard E. Muller; Matthew R. Dickie; Eric Cady; Daniel J. Ryan; Michael Eastwood; Byron van Gorp; A. J. Eldorado Riggs; Niel Zimmerman; N. Jeremy Kasdin
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Paper Abstract

Optical devices with features exhibiting ultra low reflectivity on the order of 10-7 specular reflectance in the visible spectrum are required for coronagraph instruments and some spectrometers employed in space research. Nanofabrication technologies have been developed to produce such devices with various shapes and feature dimensions to meet these requirements. Infrared reflection is also suppressed significantly with chosen wafers and processes. Particularly, devices with very high (>0.9) and very low reflectivity (<10-7) on adjacent areas have been fabricated and characterized. Significantly increased surface area due to the long needle like nano structures also provides some unique applications in other technology areas. We present some of the approaches, challenges and achieved results in producing and characterizing such devices currently employed in laboratory testbeds and instruments.

Paper Details

Date Published: 5 October 2015
PDF: 1 pages
Proc. SPIE 9556, Nanoengineering: Fabrication, Properties, Optics, and Devices XII, 955609 (5 October 2015); doi: 10.1117/12.2189216
Show Author Affiliations
Victor E. White, Jet Propulsion Lab. (United States)
Karl Y. Yee, Jet Propulsion Lab. (United States)
Kunjithapatham Balasubramanian, Jet Propulsion Lab. (United States)
Pierre M. Echternach, Jet Propulsion Lab. (United States)
Richard E. Muller, Jet Propulsion Lab. (United States)
Matthew R. Dickie, Jet Propulsion Lab. (United States)
Eric Cady, Jet Propulsion Lab. (United States)
Daniel J. Ryan, Jet Propulsion Lab. (United States)
Michael Eastwood, Jet Propulsion Lab. (United States)
Byron van Gorp, Jet Propulsion Lab. (United States)
A. J. Eldorado Riggs, Princeton Univ. (United States)
Niel Zimmerman, Princeton Univ. (United States)
N. Jeremy Kasdin, Princeton Univ. (United States)

Published in SPIE Proceedings Vol. 9556:
Nanoengineering: Fabrication, Properties, Optics, and Devices XII
Eva M. Campo; Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

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