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Proceedings Paper

Correction of mid-spatial-frequency errors by smoothing in spin motion for CCOS
Author(s): Yizhong Zhang; Chaoyang Wei; Jianda Shao; Xueke Xu; Shijie Liu; Chen Hu; Haichao Zhang; Haojin Gu
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Paper Abstract

Smoothing is a convenient and efficient way to correct mid-spatial-frequency errors. Quantifying the smoothing effect allows improvements in efficiency for finishing precision optics. A series experiments in spin motion are performed to study the smoothing effects about correcting mid-spatial-frequency errors. Some of them use a same pitch tool at different spinning speed, and others at a same spinning speed with different tools. Introduced and improved Shu's model to describe and compare the smoothing efficiency with different spinning speed and different tools. From the experimental results, the mid-spatial-frequency errors on the initial surface were nearly smoothed out after the process in spin motion and the number of smoothing times can be estimated by the model before the process. Meanwhile this method was also applied to smooth the aspherical component, which has an obvious mid-spatial-frequency error after Magnetorheological Finishing processing. As a result, a high precision aspheric optical component was obtained with PV=0.1λ and RMS=0.01λ.

Paper Details

Date Published: 27 August 2015
PDF: 7 pages
Proc. SPIE 9575, Optical Manufacturing and Testing XI, 95750D (27 August 2015); doi: 10.1117/12.2189050
Show Author Affiliations
Yizhong Zhang, Shanghai Institute of Optics and Fine Mechanics (China)
Chaoyang Wei, Shanghai Institute of Optics and Fine Mechanics (China)
Jianda Shao, Shanghai Institute of Optics and Fine Mechanics (China)
Xueke Xu, Shanghai Institute of Optics and Fine Mechanics (China)
Shijie Liu, Shanghai Institute of Optics and Fine Mechanics (China)
Chen Hu, Shanghai Institute of Optics and Fine Mechanics (China)
Haichao Zhang, Shanghai Institute of Optics and Fine Mechanics (China)
Haojin Gu, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 9575:
Optical Manufacturing and Testing XI
Oliver W. Fähnle; Ray Williamson; Dae Wook Kim, Editor(s)

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