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Proceedings Paper

Evaluation of surface figure error profile of ellipsoidal mirror for soft x-ray focusing
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Paper Abstract

It is possible to achieve soft X-ray nanofocusing with a high efficiency and no chromatic aberration by using an ultraprecise ellipsoidal mirror. Surface figure metrology is key in the improvement of surface figure accuracy. In this study, we propose a ptychographic phase retrieval method using a visible light laser to measure the surface figure error profile of an ellipsoidal mirror. We introduce a simple experimental system for ptychographic phase retrieval and demonstrate the basic performance of the proposed system. Obtainable wavefront information provides both the figure error and the alignment of the ellipsoidal mirror that yield the best focusing. This developed method is required for offline adjustments when an ellipsoidal mirror is installed in the beamline of synchrotron radiation or X-ray free-electron laser light sources.

Paper Details

Date Published: 26 August 2015
PDF: 9 pages
Proc. SPIE 9588, Advances in X-Ray/EUV Optics and Components X, 95880A (26 August 2015); doi: 10.1117/12.2188824
Show Author Affiliations
Yoko Takeo, The Univ. of Tokyo (Japan)
Takahiro Saito, The Univ. of Tokyo (Japan)
Hidekazu Mimura, The Univ. of Tokyo (Japan)

Published in SPIE Proceedings Vol. 9588:
Advances in X-Ray/EUV Optics and Components X
Shunji Goto; Christian Morawe; Ali M. Khounsary, Editor(s)

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