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Proceedings Paper

Development of achromatic full-field hard x-ray microscopy with two monolithic imaging mirrors
Author(s): S. Matsuyama; H. Kino; S. Yasuda; Y. Kohmura; H. Okada; T. Ishikawa; K. Yamauchi
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Paper Abstract

Advanced Kirkpatrick-Baez mirror optics using two monolithic imaging mirrors was developed to realize an achromatic, high-resolution, and a high-stability full-field X-ray microscope. The mirror consists of an elliptical section and a hyperbolic section on a quartz glass substrate, in which the geometry follows the Wolter (type I) optics rules. A preliminary test was performed at SPring-8 using X-rays monochromatized to 9.881 keV. A 100-nm feature on a Siemens star chart could be clearly observed.

Paper Details

Date Published: 17 September 2015
PDF: 5 pages
Proc. SPIE 9592, X-Ray Nanoimaging: Instruments and Methods II, 959208 (17 September 2015); doi: 10.1117/12.2188583
Show Author Affiliations
S. Matsuyama, Osaka Univ. (Japan)
H. Kino, Osaka Univ. (Japan)
S. Yasuda, Osaka Univ. (Japan)
Y. Kohmura, RIKEN SPring-8 Ctr. (Japan)
H. Okada, JTEC Corp. (Japan)
T. Ishikawa, RIKEN SPring-8 Ctr. (Japan)
K. Yamauchi, Osaka Univ. (Japan)


Published in SPIE Proceedings Vol. 9592:
X-Ray Nanoimaging: Instruments and Methods II
Barry Lai, Editor(s)

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