Share Email Print
cover

Proceedings Paper

Photodetector based on carbon nanotubes
Author(s): A. Pavlov; E. Kitsyuk; R. Ryazanov; V. Timoshenkov; Y. Adamov
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Photodetector based on carbon nanotubes (CNT) was investigated. Sensors were done on quartz and silicon susbtrate. Samples of photodetectors sensors were produced by planar technology. This technology included deposition of first metal layer (Al), lithography for pads formation, etching, and formation of local catalyst area by inverse lithography. Vertically-aligned multi-wall carbon nanotubes were directly synthesized on substrate by PECVD method. I-V analysis and spectrum sensitivity of photodetector were investigated for 0.4 μm - 1.2 μm wavelength. Resistivity of CNT layers over temperature was detected in the range of -20°C to 100°C.

Paper Details

Date Published: 16 September 2015
PDF: 6 pages
Proc. SPIE 9552, Carbon Nanotubes, Graphene, and Emerging 2D Materials for Electronic and Photonic Devices VIII, 95520V (16 September 2015); doi: 10.1117/12.2188176
Show Author Affiliations
A. Pavlov, Institute of Nanotechnology in Microelectronics (Russian Federation)
E. Kitsyuk, SMC Technological Ctr. (Russian Federation)
R. Ryazanov, SMC Technological Ctr. (Russian Federation)
V. Timoshenkov, National Research Univ. of Electronic Technology (Russian Federation)
Y. Adamov, National Research Univ. of Electronic Technology (Russian Federation)


Published in SPIE Proceedings Vol. 9552:
Carbon Nanotubes, Graphene, and Emerging 2D Materials for Electronic and Photonic Devices VIII
Manijeh Razeghi; Maziar Ghazinejad; Can Bayram; Jae Su Yu; Young Hee Lee, Editor(s)

© SPIE. Terms of Use
Back to Top